Two Minute Bit
Technology · ~2 min

Every chip is printed by light from plasma 40 times hotter than the Sun.

2nd pulse: vaporize1st pulse: flattentin droplet~220,000 C40x the Sunprints the chip
A tin droplet enters the chamber and is flattened by a weak laser pulse, then a stronger pulse vaporizes it into a plasma flash hotter than 220,000 C, about 40 times the Sun's surface. That flash is the 13.5 nm light, and it is what prints the chip.

A tin droplet enters the chamber and is flattened by a weak laser pulse, then a stronger pulse vaporizes it into a plasma flash hotter than 220,000 C, about 40 times the Sun's surface. That flash is the 13.5 nm light, and it is what prints the chip.: tin droplet · 1st pulse: flatten · 2nd pulse: vaporize · ~220,000 C · 40x the Sun · prints the chip

A microchip's circuitry is etched with light, and the finest chips need an absurdly short wavelength: 13.5 nanometers. Nothing emits it cleanly, so ASML's machines manufacture it. They fire tin droplets, hit each one twice with a CO₂ laser, and the second pulse vaporizes it into a plasma hotter than 200,000°C. That flash of plasma is the light source. It happens about 50,000 times a second.

Where does an EUV machine's 13.5 nm light actually come from?

The light that prints your chip is born from a tin droplet, flash-burned hotter than a star.

Sources

ASML: How EUV lithography works

confidence: verified · every bit is fact-checked before it ships

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